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Image Product Details Inquiry
ADE 8100 Microscan

Measures wafer thickness, bow, warp, site flatness, and global flatness.

 
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ADE UltraGage 9500

Measures thickness, shape stress, global and site flatness. Multifunction dimensional measurements for 500 nm design rule. Supports 4" to 8" wafers..

 
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ADE Ultrascan 9300 Wafer Inspection System

Non-contact capacitive probe measurement with 10nm resolution, 400 to 1000 microns wafer thickness range. Capable of handling 100mm to 200mm wafers.

 
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ADE Ultrascan 9350 Wafer Inspection / Sorter System

Non-contact capacitive probe measurement with 10nm resolution, 400 to 1000 microns wafer thickness range. Capable of handling 100mm to 200mm wafers.

 
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Canon PLA 501F Parallel Light Mask Aligner
Parallel Light Mask Aligner Cassette to cassette mask aligner can be used manually or in auto mode. Mask aligner for 2"-5" wafers.
 
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Convergent 3000 Mask Coater with Bake

Resist coat tool for mask substrates for use in advanced mask writing application.

 
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Dektak 3030 Surface Profiler

Dektak 3030 Surface Profiler - Measures vertical features ranging in height from 131 micron to 50 angstroms on a variety of substrate surfaces.

 
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Dektak IIA (Sloan)
Surface Profile Measuring System, Capability up to 6".
 
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Electroglas Xynetics 1034X Wafer Prober with Station

This tool is designed to provide a high throughput capacity. It features a temptronics 4 inch thermal Chuck and Miller temperature controller.

 
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Electroglas Xynetics 1034X Wafer Prober with Station (2)

This tool is designed to provide a high throughput capacity. It features a temptronics 4 inch thermal Chuck and Miller temperature controller.

 
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Electroglas Xynetics 1034X Wafer Prober with Station (3)

This tool is designed to provide a high throughput capacity. It features a temptronics 4 inch thermal Chuck and Miller temperature controller.

 
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Electroglas Xynetics 1034X Wafer Prober with Station (4)
This tool is designed to provide a high throughput capacity. It features a temptronics 4 inch thermal Chuck and Miller temperature controller.
 
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GaSonics L3500(2)

GaSonics L3500 .PDF SPEC SHEET (click to view specifications)

 
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GaSonics L3500(3)

GaSonics L3500 .PDF SPEC SHEET (click to view specifications)

 
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InspecTech KIS 2000 Inspection System

An automatic system that inspects wafers that have already been diced. It inspects both sides of the the diced wafer for any chipping or cracking.

 
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KLA-Tencor / Inspex Eagle Wafer Inspection System
An in-line inspection system for detecting, classifying and correcting yield limiting defects on all product types and wafer sizes, including 300 mm.
 
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KLA-Tencor / Prometrix FT-600 Film Thickness Mapping System
Automated in-line measurement and mapping system for process and monitoring wafers. Accommodates wafer sizes from: 3- - 8"
 
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KLA-Tencor / Prometrix FT-650 Film Thickness Mapping System
Automated in-line measurement and mapping system for process and monitoring wafers. Accommodates wafer sizes from: 3 - 8"
 
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KLA-Tencor / Prometrix FT-700 Wafer Film Thickness Measurement System
Measures standard film thickness, reflectivity and very thin films (<500Å). Accommodates wafer sizes: 3" to 8".
 
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KLA-Tencor / Prometrix FT-750 Wafer Film Thickness Measurement System
A film thickness probe that accommodates wafer sizes from 100mm - 200mm.
 
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KLA-Tencor / Prometrix Omnimap NC-110 Non-Contact Resistivity System
A non-contact resisitivity system. Measures complex aluminum and tungsten multilayer metallization schemes such as TiN/A1/TiN or W/TiN. It accommodates wafers from 50mm to 200mm.
 
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KLA-Tencor / Prometrix RS35C Resistivity Mapping System
The OmniMap collects and analyzes sheet resistance data on various conductive layers such as implants, diffusions, epi, CVD, metals and bulk substrates.
 
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KLA-Tencor / Prometrix RS35C Resistivity Mapping System (2)
The OmniMap collects and analyzes sheet resistance data on various conductive layers such as implants, diffusions, epi, CVD, metals and bulk substrates.
 
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KLA-Tencor / Prometrix RS50(E) Resistivity Mapping System

A tool with all the basic functions of a 4-point probe, plus contour and 3-D mapping output. It also has trend charts in order to track process and equipment performance.

 
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KLA-Tencor / Prometrix RS55 Resistivity Mapping SystemWafer size 2" - 8" Manual Load
OmniMap® four point probe resistivity mapping system for sheet resistance process control. It accommodates wafer sizes  2" - 8". This system comes with a type B probe head (Table Top Unit).
 
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