Semitool Single "Table Top" Spin Rinser Dryer capable of processing up to 6" wafers. Possible options include: rotors, static eliminator, resistivity monitor and water recirculator.
Water Soluble Solvent Tool (WST) is designed for sray delivery of non-phenolic, water soluble chemical across wafer or substrate surface. Capability of 100mm - 125mm wafers.
