AL 300 LARGE GAP ALIGNMENT SYSTEM (VIDEO FRAME GRABER), 10X OBJECTIVES, 4 INCH ALIGNMENT CHUCK, 5 INCH INCH MASK HOLDER.
Karl Suss MA6 Mask Aligner / Exposure System Unit with video backside alignment, For wafers 2" dia. up to 150mm dia. or substrates 3"x 3" up to 6" x 6"
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