Photostabilization System - Capable of 4" to 6" Wafers. 150 PC Photostabilization Systems provide a cost-effective, one-step solution for photoresist stabilization of 75-150 mm wafer substrates Cassette to cassette handling.
Karl Suss MA6 Mask Aligner / Exposure System Unit with video backside alignment, For wafers 2" dia. up to 150mm dia. or substrates 3"x 3" up to 6" x 6"