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AG Associates Heatpulse 410 Features/Specifications:

• Rapid Thermal Processor PC Control Capability of 2" to 5" Wafers
• Closed-loop temperature control with pyrometer or thermocouple temperature
  sensing.
• Steady State Temperature Range: 400°C - 1200°C
• Steady State Temperature Stability: (+ or -) 7°C
• Heating Rate: 150°C Per Second
• Cooling Rate: Temperature Dependent - Max 150°C Per Second