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AG Associates 610 Heatpulse Features/Specifications:

• Rapid Thermal Processor
• PC Controller
• Steady State Temperature Range: 400°C - 1200°C
• Steady State Temperature Stability: (+ or -) 7°C
• Heating Rate: 150c Per Second
• Cooling Rate: Temperature Dependent - Max. 150°C Per Second
• Capability of 2" to 6" Wafers