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Auto Feeder: Single, cassette to cassette, backside wafer handling Wafer size: currently 5" (4" and 3" sizes available) Auto Feeder: Single, cassette to cassette, backside wafer handling Wafer size: currently 5" (4" and 3" sizes available) afer size: currently 5" (4" and 3" sizes available) Mask size: currently 6" (5" and 5" sizes available) Mask size: currently 6" (5" and 5" sizes available)Resolution: 1.5um (positive resist)Depth of Focus: > + 6um (linewidth 1.5um)Depth of Focus: > + 6um (linewidth 1.5um)Distortion: 3sigma < 0.5um Scanning Accuracy: < + 1.5% Scanning Accuracy: < + 1.5% Scanning Accuracy: < + 1.5% Auto Alignment Accuracy: LBS AA 3sigma < 0.6um (HeNe laser beam scan) Throughput (6ˇ±wafer): > 83 wfs/h (first mask mode) / > 72 wfs/h (LBS AA mode)
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408-654-9500
