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Canon PLA 501F Parallel Light Mask Aligner Featuers/Specifications:
- Can be used manually, semi-auto or in auto mode
- Mask aligner for 2"-5" wafers
- Printing Method: 1. Proximity, 2. Hard Contact, 3. Soft Contact
- Printing time: 2 seconds for negative resist; 5 seconds for positive resist
- Uniformity + 3& table
- Alignment Method: High pressure air 3.5 kg/cm² (49.8 p.s.i.) or more
- Alignment Time: ~10 seconds
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