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High Speed Multilayer Wafer Inspection For Process Defects Inspection Models for Arrayed and Random Patterns- 4" to 8" Water Capability KLA 2132 High Speed Multilayer Wafer Inspection for Process Defects High Speed Multilayer Wafer Inspection For Process Defects Inspection Modes for Arrayed and Random Patterns- 4" to 8" Water Capability Blanket Film Inspection Clustering and Review Sampling Option Automated Operation Automated Wafer Transport with Cassette-to-Cassette Robotic Loading Automated Test Site Acquisition Automatic Focusing High Speed Micro Comparison for Defects Data List and Summary Output Control Terminal 120 VAC, 3 Phase, 25A, 50/60 Hz Image Computer Floppy Drive Tape Drive Keyboard, Mouse 2 Monitors Pacific Power Control, Inc. Power Line Conditioner
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