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Non-Patterned Wafer Surface Inspection System.Throughput 150 per hour of 200mmWafer Size 100,125,150,200 mm KLA-Tencor Surfscan 6220 Unpatterned Surface System Inspection System Wafer Size 100,125,150,200 mm System Calibrated, And Tested At SPEC Equipment. Sensitivity: 0.09um @ 80% Capture Rate Repeatability is less than 1.0% at 1 of 0.204 diameter latex spheres on bare silicon Throughput 150 per hour of 200mm Contamination is less than 0.005 particles/cm2 greater than 0.15um Illumination source is 30mW Argon-Ion laser, 488 wavelength Haze Sensitivity is 0.02ppm3
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