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KLA-Tencor P20H Long Scan Profiler Features/Specifications:
- Measures vertical features ranging from under 100Å to approximately 0.3 mm, with a vertical resolution of 1 or 25.
- Has the ability to fit and level data, allowing accurate measurements on curved surfaces.
- Handles wafers from 3" to 8" cassette to cassette
- 2-D and 3-D plots and contour maps
- Scans up to 25 wafers without operator intervention Full 8" scanning
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408-654-9500
