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UV 400 w/Diffraction Reducing Optics, With 1000Watt Lamphouse Wafer Size Up to 6" diameter / Mask Size up to 7"Karl Suss MA-150ML Manual Mask Aligner w/ Video Backside AlignmentSystem to includes the following features:UV 400 w/Diffraction Reducing Optics, With 1000Watt LamphouseSuss Splitfield Microscope w/85 watt fiber optic illuminator (10x objectives, 10x eyepieces365mm/405mm Constant Intensity Internal SensorSuss CIC1000 Constant Intensity UV Power SupplyOne Mask Holder / One Standard Wafer Chuck and one mask loading chuckWafer Size Up to 6" diameter / Mask Size up to 7"PC Controller / with Touch ScreenVideo backside alignmentAuto mask loader Hard contact 1.0um resolutionSoft contact 1.5um resolutionProxmimity 2.5um resolution Resolutions are with optimal wafer/process conditions

Overlay accuracy: Topside: 0.5um resolution Backside: 1.0um resolution