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A fully automatic wafer profiling flat and notch detector.
The Lumonics Wafer Mark II Laser Identification System Features/Specifications:
- Cassette handling system.
- Accommodates 2" to 6" wafers
- Throughput: 125 wafer per hour
- Uses a YAG LaserMarks on any location on the wafer
- Variable marking depths from 0.3mm to 200µm
- HeNe alignment laser
- Single cassette elevator
- PC-based system controller
- Power input: 208V, 3-phase Y, 60 Hz, 30 A
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408-654-9500
