PC Base Controller - Double Stack Horizontal Diffusion Furnace - Capable up to 200mm wafersPC Base Controller - Double Stack Horizontal Stack large bore diffusion furnace for 200mm wafers,Upper tube with Black Max element (200C-1200C) configured for high temperature oxidation Lower tube has Aztec Helix element (range 400C-1300C) pn044-9319815 Load Station cantilever loader Control unit: upper tube has 4 Unit MFC's / Lower tube has 2 Unit MFC's dual Argus gas control modulesPC Base Controller