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The OmniMap collects and analyzes sheet resistance data on various conductive layers such as implants, diffusions, epi, CVD, metals and bulk substrates. It accommodates wafers from 2" - 8".
Prometrix RS35C Features/Specifications:
- 4 point prober with printer
- 3-D mapping and contour
- Trend charts
- Measurements from 5m ohms/sq to 5M ohms/sq on 2in. to 8in. wafers by uniting sophistricated modeling algorithms, advanced analysis techniques and precision electronics
- Measures up to 1264 sites per wafer using standard or user-defined patterns
- Can display these test results in the form of contour maps, 3-D maps, diameter scans and die maps
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408-654-9500
