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Category   >> Ellipsometers/Film Thickness Measurement   >> Prometrix RS55 TC Resistivity Mapping SystemWafer size 2" - 8" Manual Load
Category   >> Metrology - Test & Inspection System   >> Prometrix RS55 TC Resistivity Mapping SystemWafer size 2" - 8" Manual Load

Prometrix RS55 TC Resistivity Mapping SystemWafer size 2" - 8" Manual Load

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OmniMap® Four Point Probe Resistivity Mapping System For sheet resistance process control. Customer to request type of Probe head required.System includes TC option (Temperature Compensation Hardware)Prometrix RS55 TC Resistivity Mapping System With Type B Probe Head (Table Top Unit)System includes TC option (Temperature Compensation Hardware) Omni Map Four Point Probe Resistivity Mapping System For sheet resistance process control. Customer to request type of Probe head required.Measures the sheet resistance of conductive layers created by Ion implant, diffusion, epi, CVD and metallizationTrend Charts Wafer size 2" - 8" Manual LoadMeasures up to 1264 sites per waferDisplays results in the form of polar contour maps3-D mapping and ContourDiameter scans or X-Y maps.Unit is a table top system Measurement Range Absolute Accuracy 1% of NIST/VLSI Certified RangeMeasurement Repeatability Typical Measurement Time 3.5-4.5 Seconds per Test Site44 Mb Data Cartridge Included 486 Computer 3.5" Floppy Drive5