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The Auto EL III is an ellipsometer designed to provide precise film thickness measures. This tool has a non-volatile memory, allowing users to retrieve previously determined sample parameters. The system's thermal printer can provide a hard copy of the results as well.

Rudolph Research Auto EL III Ellipsometer Features/Specifications:

• Internal data reduction software for single and double layer transparent films.
• Operating wavelength: 632.8nm
• Operating principle: Null seeking
• Light source: HeNe Laser
• Resolution and Accuracy:
  • Polarizer or analyzer: 0.05°
  • Delta 0.1°
  • Psi 0.05°
• 6in (diameter) quickload stage
• Built in printer
• Measuring time: 17 - 50 seconds
• Automatic R-06" sample stage: movement can be pre-programmed or controlled via joystick
• X/YSECS II interface
• Thickness range: 10Å to 3.0µm
• Repeatability: <Å or 1%, whichever is greater
• Accuracy: ±3Å (Compared to NIST wafers), ±0.005 (Refractive index)