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The Auto EL IV is an ellipsometer designed to provide precise film thickness measures. This tool has a non-volatile memory, allowing users to retrieve previously determined sample parameters. The system's thermal printer can provide a hard copy of the results as well.

Rudolph Research Auto EL IV Ellipsometer Features/Specificatons:

• Multi-Wavelength: uses light at 3 different wavelengths
• Wavelength: 633, 576, 405nm
• Automatic R-06" sample stage: movement can be pre-programmed or controlled via joystick
• Tungsten halogen laser
• Includes micro-spot
• Measuring time: 17 - 50 seconds
• Operating wavelength:
• Polarizer or analyzer: 0.05°
• DELTA: 0.1°
• PSI 0.05
• SECS II Interface
• Internal data reduction software
• Built in Printer
• Maximum sample size: 150mm