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The Semitool Spray Acid tool (SAT) is a production tool designed to provide a complete process including acid processing, rinsing, and drying of substrates in a single process chamber. Applications include wafer cleaning, metal etch and stripping. (accommodates 6" substrate-low profile) N2 purged dedicated chemical and DI water spray manifolds Dedicated TFE N2 dry manifold
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408-654-9500
