Semitool SAT 208 (2P) Spray Acid Tool-Surplus Process Equipment Corporation

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Category >> Cleaning Systems >> Semitool SAT 208 (2P) Spray Acid Tool
Category >> Wet Process Systems-Stripper-Develop >> Semitool SAT 208 (2P) Spray Acid Tool

Semitool SAT 208 (2P) Spray Acid Tool

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The Semitool Spray Acid tool (SAT) is a production tool designed to provide a complete process including acid processing, rinsing, and drying of substrates in a single process chamber. Applications include wafer cleaning, metal etch and stripping. (accommodates 6" substrate-low profile)N2 purged dedicated chemical and DI water spray manifolds Dedicated TFE N2 dry manifold