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Water Solvent Tool (WST) is designed for spray delivery of non-phenolic, water soluble chemical across wafer or substrate surfaces, rinse with D.I. water and nitrogen pured spin dry cycle. It is capable of working with 100 - 125mm wafers.
Semitool WST 306 Features/Specifications:
- 4 tanks: one fresh and one reclaim tank for one water soluble process chemical, and one solvent process chemical.
- The fresh and reclaim tanks for the water soluble chemicals have in-tank heaters with temperature control.
- System cabinet material is stainless steel.
- The non-phenolic, biodegradable, low-toxicity chemicals strip/develop or clean up to 100c.
- Membrane keypad and display
- 3½ floppy drive
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408-654-9500
