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Coat Vacuum Bake. 2" to 5" wafer capacity. 500-7,500 RPM speed range. Spin cycle timing range from .1 to 999.1 seconds 10 milliseconds. Accelration adjustable 1,000 to 40,000 RPM per second. Phototransistor pick-up, with digital read-out. Coat/Vacuum Soft Bake: 112 wafer/hour. Develop vaccum hard bake 85 wafers/hour. 115 V, 50/60 Hz Single Phase
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408-654-9500
