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Category   >> Etchers   >> TEL 580LC Etch system Cassette to Cassette Handling 2" to 6" Wafer Capacity.
TEL 580LC Etch system Cassette to Cassette Handling 2" to 6" Wafer Capacity.

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Load Lock Etcher 5 Gas Channel 2" to 6" Wafer Capacity.TEL 580LC Etch SystemFully Automated Microprocessor Control High-throughput Vacuum Load Lock Programmable Variable Electrode Spacing End Point Detection, Cassette to Cassette Load Five Gas Channel Maximum
 
 

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