8" Cassette to Cassette Single Wafer Downstream Microwave Asher w/ Loadlock GaSonics Aura 2000LL Asher Downstream microwave source and a dictated reactor chamber 8" Cassette to Cassette Single Wafer Asher Configured for 4" - 8" wafers Customer to Specify. Loadlock with cool-down station for processed wafer Gas box, designed to hold 4 MFC's capability (System includes 2 MFC's calibrated to customer gas specifications Downstream endpoint detection Rear access with control panel for servicing No RF damage (0.1 VOLT CV SHIFT) Front and backside etching Variable platen temperature Alumina (ceramic) Plasma Tube Fluorine compatible chamber SECS II interface MKS throttle valve & controller Multiple step process capability.
408-654-9500
