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Can measure defects on unpatterned wafers and measuring wafers from 4" to 8" KLA / Tencor 7600 Surfscan Patterned / Unpatterned Wafer Inspection System Can detect defects as small as 0.15 m Can measure defects on unpatterned wafers and measuring wafers from 4" to 8" High sensitivity on after-etch and high topography applications Dual Collection Channels Circular Input Polarization Multi Scan Multi-Thresholding capable Auto Learn Programmable Spatial FilerCount repeatability error ,1.5% at 1 standard deviation Mean count.500, 0.5mm diameter latex spheres standard) High Speed digital signal processing Off-Axis collection with programmable spatial filterVariable Collection ApertureVariable polarization 30 mw Argon-Ion Laser488nm wavelength variable input polarization .
ASSET#4483 (Microscope)
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408-654-9500
