Rudolph Research FE-III Focus Ellipsometer

Fully automated high speed focused beam ellipsometer for simultaneous multi-angle measurements.

Fully automated 3-axis robot wafer handling with random access to three cassette 4" to 8" capable Light source: 633nm HeNe laser, 780nm laser diode Spot Size 12x24um, test site: de-skew only 125um, site by site 50um Color-corrected optics, auto focus, field of view: low mag 7 x 9mm high mag 0.9 x 1.2mmrOptional pattern recognition, edge or gray scale detection, manual or auto de-skew re-tech Pre-aligner: flat notch finder, x / y centering + or - 50um, theta + or -0.1, de-skew + or - 5um Stage accuracy: 7um over 200mm