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Tencor Surfscan 4500 Surface Particle Inspection Analyzer
Laser -based system that scans the entire substrate surface, producing
color coded graphic displays and hardcopy printouts of particles
locations.
Sub micron particles, down to 0.2um are readily detected.
Measurement time : 30 sec on 6" wafers
Particles Sensitivity : 0.2um diameter latex spheres.
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408-654-9500
