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A laser-based system that scans the entire substrate surface, producing color-coded graphic displays and hardcopy printouts of particles locations.
KLA-Tencor Surfscan 4500 Features/Specifications:
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Sub micron particles, down to 0.2µm are readily detected.
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Measurement time : 30 sec on 6" wafers
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Particles Sensitivity : 0.2µm diameter latex spheres.
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Haze Sensitivity : 0.4ppm
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Spatial Resolution : 50µm spacing minimum Spatial R
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Measurement Range : 0.004µm and 102µm in twelve ranges and 256 gradations
For more information on the Surfscan series, click here.
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408-654-9500
