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A surface profile measuring system. It measures step height, geometry, roughness, and waviness parameters. It scans up to 8000 data points per scan.
Veeco Dektak 3ST Surface Profiler Features/Specifications:
- Step heigh measurement range:
- Maximum: 100Å
- Minimum: 1310 kÅ
- Stylus Radius: 2.50 micron
- Wafer size range: Up to 150mm
- Motorized X/Y stage
- Scan length range: 50 microns to 50mm
- Scan speed ranges: low, medium, high
- Scan time range: 3 to 50 seconds
- Power requirements: 115V; 50/60Hz; 1 phase
- Exterior Dimensions (in): 12W x 22D x 16H
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408-654-9500
