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Category   >> Metrology - Test & Inspection System   >> Rigaku XRF 3640 X-Ray Wafer Analyzer
Category   >> New Arrivals   >> Rigaku XRF 3640 X-Ray Wafer Analyzer
Category   >> X-Ray   >> Rigaku XRF 3640 X-Ray Wafer Analyzer

Rigaku XRF 3640 X-Ray Wafer Analyzer

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408-654-9500
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Continuous rating: max. 60 kV - 100 mA, 3 Kw

Control system: detection on secondary side, control on primary side.

Stability: within ±0.01% power supply variation ±10%

Security detection mechanism: (If any security item is detected,

X-ray turns OFF, indicating the error item on the CRT screen.)

Temperature of X-ray tube cooling water

Electric conductivity of X-ray tube cooling water

Flow rate of X-ray tube cooling water

Pressure of X-ray tube cooling water

Leak current of X-ray tube

Extreme high pressure, Extreme low pressure, Overload

Burning of X-ray indication lamp

Simultaneously opened X-ray shutter and lid

Tube voltage setting:   20 to 60 kV (at a step of 5 kV)

Tube current setting:    2 mA, 5 to 100 mA (at a step of 5 mA)

X-ray indicator lamp:   on the system operation panel

Automatic aging function:   the following items are operable with keys on the CRT operation screen.

X-ray tube  (AFX-77L-Rh)

Target:  Rh

Maximum rating:   3Kw

Super light elements including B, C and Wsix (tungstem silicide) can be analyzed at high precision

Unit is setup with the following channels:
Fixed channel: Ba (barium)
Fixed channel: Sr (strontium)
Fixed channel: Ti (titanium)
Scanning channel

Sample chamber:
Sample irradiation method:   at the underneath side
Sample rotation:   6rpm
(fixed rotation independent of the power supply frequency, 50/60 Hz)

X-ray atmosphere:   vacuum/ the air (normally measured in a vacuum condition)

Maximum sample size:  200 mm