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GaSonics 7104 Plasma Treatment and Cleaning
The 7100 Series is the most popular of the GaSonics International industrial batch treatment and cleaning systems. This full-featured system is based on proven reactor features and system drivers developed over the past twenty years.
The GaSonics tool is a batch plasma system. Processing is accomplished at low temperature, and i usd for surface treatment, descum, and cleaning organic material such as photoresist from metal, silicn, and other assemblies.
GaSonics 7100 Series Features/Specifications:
- Lowest cost of ownership asher, > 95% uptime, 320 systems in production
- High throughput
- Very small footprint: 80cm (32¿) Width x 80cm (32¿) Length x 70cm (28¿) Height
- Front and backside isotropic removal
- Downstream ashing for minimized device damage
- 75mm-1500mm wafer capability
- Pick and place wafer handling
- Precise endpoint detection
- Up to 2 MFC¿s
- Pressure control, option
- SMIF compatible
- SECS II interface, multiple process step capability
- Variable lamp heating for temperature control
- Table top or floor/through the wall designs
For more information about the GaSonics 7100 Series click here.
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408-654-9500
