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 - KLA-Tencor 6100 Surfscan  FilmInspection                                            

-  Capable of 2" -8" wafers.          
-  Currently configured for 200mm wafers          
-  Non-patterned surface Inspection System.          
-  0.09 micron Defect Sensitivity @ 80% capture, based on PSL Standards.          
-  0.02 ppm Haze Sensitivity          
-  0.002 ppm Haze Resolution          
-  Accuracy within 1%          

-  XY coordinates          
-  System refurbished to OEM Specifications