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Can measure defects on unpatterned wafers and measuring wafers from 4" to 8"
KLA / Tencor 7700 Surfscan Patterned / Unpatterned Wafer Inspection System
Can detect defects as small as 0.15 m
Can measure defects on unpatterned wafers and measuring wafers from 4" to 8"
High sensitivity on after-etch and high topography applications
Dual Collection Channels Circular Input Polarization Multi Scan Multi-Thresholding capable Auto Learn Programmable Spatial Filer
Count repeatability error ,1.5% at 1 standard deviation
Mean count.500, 0.5mm diameter latex spheres standard)
High Speed digital signal processing
Off-Axis collection with programmable spatial filter
Variable Collection ApertureVariable polarization 30 mw
Argon-Ion Laser488nm wavelength variable input polarization . (Microscope)
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408-654-9500
