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These steppers are ideal for high-volume manufacturing, where low capital and operating costs combine with increased throughput for high productivity. It is capable of working with 2" to 8" wafers, and exposes reticule images in a step-and-repeat manner.

Ultratech 1500 Stepper Features/Specifications:

• Fine line resolution (0.1µm standard, .8µm optional) and tight overlay accuracy
• A large exposure field, permitting large die exposure
• Electronic focus system for more accurate and repeatable substrate positioning in focal plane
• XY Stage, air bearing, laser metered, resolution of .00004mm
• PC controlled HP9122c computer
• Throughput : 55 WPH (1.0µm lens), 45 WPH (0.8µm lens)
• Auto Pre-alignment
• Cassette to cassette Load