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Dektak IIA (Sloan): Surface Profile Measuring System, Capability up to 6"
Dektak IIA (Sloan) Specifications:
- Three scan speeds
- Scan Length: 50 microns to 30 mm
- Tracking Force: 10 to 50 mg.
- Vertical Resolution (max.) 5A
- Horizontal data points (max.) 1000
- Horizontal Resolution 0.05um
- Stylus Tracking Force from 10 to 50mg (Manually adjustable)
- Video cameraoptics for sample viewing 90x (35x to 200x optional)
- Sample Stage X axis +/- 10mm
- Sample Stage Y axis +/- 10mm to -70mm
- Sample Stage Theta Rotation 360*
- Sample Stage Theta Rotation 360*
- Sample Stage Theta Rotation 360* 115V, 50/60 Hz.
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