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Branson IPC L3200 Features/Specifications:

• Dual quartz chambers for 100-150mm wafers (or 150-200mm wafers(, cassette to cassette operation
• Automatic pick-and-place wafer handling
• Automatic pneumatic soft-lift assemblies for each chamber.
• In-line gas filters (0.05 micron)
• Two PM 732 automatch networks
• Quartz halogen lamp for preheating
• Process Capabilities:
• Positive and negative resist, hardened resist, polyimide
• Process control & Instrumentation: Microprocessor controller, menu driven
• Programmable Process Parameters: Gas flow, chamber pressure, RF Power, Strip time, Heat Lamp On time, overstrip time
• Programmable Tolerance Limits: RF Power (forward and reflected), Time Pressure, gas flow, pumpdown
• Automatic pressure control
• CRT system status display
• Programmable tolerance limit alarm