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Dual quartz chambers for 100-150mm wafers, cassette to cassette operation
Process capabilities: positive and negative resist, hardened resist, Polyimide
Automatic pneumatic soft-lift assemblies for each chamber
In-line gas filters (0.05 micron)
Two PM 732 automatch networks
Quartz halogen lamp for preheating
Microprocessor controller, menu driven 20 recipes maximum
Programmable Pr
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408-654-9500
