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Batch centrifugal spray cleaning tool for carriers and boxes, including 300mm Front Opening Unified Pods (FOUPs), Front Opening Shipping Box (FOSBs).

• The Storm III, an economy cleaner, is designed to clean cassette box or carrier sizes, up to 200mm
• The Storm300 cleans and dries eight 300mm FOUP and eight FOUP doors in less than 30 minute
• The Storm300 cleans and dries up to 30 cassettes or FOUPs/FOSBs in an hour
  

Benefits

• Low cost of ownership: the world's most economical cassette/box washer
• The Storm is capable of through-the-wall installation
• High productivity

Features

• Rotates product through a DI water spray with optional surfactant to all sides of the product
• Rotation can be reversed to ensure full spray penetration of product
• Centrifugal acceleration drying, coupled with ULPA filtered and heated air
• Surfactant delivery system enhances cleaning efficiency
• Dual color touch screens with graphics display user interface
• Electropolished stainless steel chamber and rotor
• Ladder nests accept 13 and 25 wafer FOUPs (Storm300)
• Twelve DI spray manifolds with multiple PVDF nozzles
• Capable of through-the-wall installation
• Vibration monitor
• Anti-static system for drying cycle
• Brushless DC motor drive with digital control of rotor positioning and RPM