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Batch centrifugal spray cleaning tool for carriers and boxes, including 200mm Front Opening Unified Pods (FOUPs), Front Opening Shipping Box (FOSBs).

Semitool Storm III Cassette Cleaner Features/Specifications:

• Capable of through-the-wall installation
• Rotates product through a DI water spray with optional surfactant to all sides of the product
  • Rotation can be reversed to ensure full spray penetration of product
• Centrifual acceleration drying, coupled with ULPA filtered and heated air.
• Surfactant delivery system enhances cleaning efficiency
• Dual color touch screens with graphics display user interface
• Electropoloshed stainless steel chamber and rotor
• 12 DI spray manifolds with multiple PVDF nozzels
• Vibration monitor
• Anti-static system for drying cycle
• Brushless DC motor drive with digital control of rotor