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A rapid thermal processing system with 4 cassette ports and one cooling station. It accommodates wafer sizes from 75 to 200mm).
Steag AST SHS2000 Rapid Thermal Processor Features/Specifications:
- 4 cassette ports
- 1 cooling station
- Process Control: 386/486 computer system with hard disc process control:
- 5 MFC's (Bronkhorst 9115-569M / F201C)
- Process Gases:
- Standard: NH3, N20, Ar, 02
- Recommended Temperature Range: 400c to 1200
- Absolute Temperature Accuracy:
- with Thermocouple Control: ±2°C
- with Pyrometer Control : ± 4°C
- Temperature Duration: 0-1000sec per step
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408-654-9500
