The Karl Suss MA150 production aligner platform offers a higher overlay accuracy, more flexible wafer handling including reject and buffer cassette option and SECS II/GEM functionality.
The Karl Suss MA150 Mask Aligner Features/Specifications:
- 10x objectives
- 1000-watt lamphouse
- UV 400 diffraction reducing optics
- 365nm/405nm internal sensor
- SUSS CIC 1000 watt power supply
- Suss splitfield video microscope
- 150 watt fiber optic microscope illumination
- Automatic cassette to cassette operation
- PC Controller with touch screen
- Throughput: > 100 wph (including auto-alignment)
- 6 inch maskholder
- Vacuum chuck: 6in/150mm
For more information on this tool or the series, click here.
408-654-9500
