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Measures wafer thickness, bow, warp, site flatness and global flatness

ADE MicroScan 8100 Wafer Inspection / Sorter  System Features:

• Pre-aligner station
• Bow and warp station
• Non-contact probe measurement
• Capable of measuring 75mm-200mm wafers
• Up to 6 senders, 24 receivers
• Cassette to cassette beltfeed handling
• Can sort up to 1900 wafers an hour

For more information on this tool, take a look at our brochure here.