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Fusion 200 PCU Photostabilizer System Features/Specifications:
A photostabilizer with a fully automated, stand-alone, system for unicassette processes. Allows wafer sizes: 100mm to 200mm.
- Three axis robotic pick and place
- Chuck temperature range: 50°C to 230°C
- SEC/GEM compatible
- Selectable software operating modes
- Clean room products Hepa/Fan unit.
- Fully enclosed with removable covers
- 208VAC 60 Hz, 3 phase, 30 amps/phase
- System refurbished to meet OEM specifications
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408-654-9500
