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A resistivity mapping system that measures the sheet resistance in conductive layers created by ion implant, diffusion, epi, CVD, and metallization.
The KLA-Tencor RS55/TC Resistivity Mapping System Features/Specifications:
- OmniMap four point probe resistivity mapping system
- Includes temperature compensation hardware (TC)
- Trend charts
- Measures up to 1265 sites per wafer
- Works with wafer sizes 2" to 8"
- Displays results in the form of polar contour maps
- 3-D mapping and contour
- Diameter scans for X-Y maps
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408-654-9500
