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This is a downstream RIE or isotropic plasma barrel asher/etcher system. It comes with the RF generator: Advanced Energy RFX-600 (AE RFX-600) and a refrigerated circulator: Remcor CFF-500. (Click images to the left to see the entire system)
March PX-1000 System Features/Specifications:
- Chamber interior dimensions, inches: 16.25w x 17h x 20d
- Max. number of shelves: 14
- 1000 Watt output
- Power requirements: 220 V, 50/60 Hz, 1 phase
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408-654-9500
