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Category: RIE

    showing 1 - 2 of 2  
Image Product Details Inquiry
March PX-1000 Batch RIE Asher/Etcher System
This is a downstream RIE or isotropic plasma barrel asher/etcher system. It comes with the RF generator: Advanced Energy RFX-600 (AE RFX-600) and a refrigerated circulator: Remcor CFF-500.
 
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Yield Engineering YES R-3 Plasma Cleaning System
A low cost, low volume, plasma cleaning system with sequencer control. It comes with a capacitive downstream reactor and a multi-program microprocessor controller. 
 
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    showing 1 - 2 of 2  
 
 

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