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ADE Ultra Gage 9500 Features:

• Multifunction Dimensional measurements for 500 nm Design Rule.
• Supports 4" to 8" wafer diameter
• Capable of measuring 8,700 data points in less than 60 seconds.
• 2-D contour map.

Measurement Functionality includes:

• Thickness - centerpoint, five point, and full wafer scan.
• Shape - Bow and Warp using 3-point or Best-Fit reference.
• Global Flatness - SEMI, GBI, TIR, FPD, FPD%
• Site Flatness - All Semi M1 standards with 8-30 millimieter site size and variable offsets.

For more information on this tool, click here. If you would like more information on the UltraGage series, click here.