A polyimide bake oven that is designed for 8 cassettes, accommodating wafers up to 6" wafers.
YES-450 PB6-8P Polyimide Bake Oven Features/Specifications:
- High termperature, air cool, laminar flow oven
- 100 micron laminar flow inlet filters
- Operaates at temperatures up to 450°C
- Front panel PLC controller with touchscreen
- Programmable temperature controller
- 24 Volt AC instrumentation
- High and low nitrogen checkpoint
- Power requirements: 208 volts, 60Hz, 30 amp, 3 phase, 7000 watts
- Preheated N2 (Process gas)
408-654-9500
