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We adhere to the highest equipment refurbishment standards, following all GaSonics documentation and procedures for the rebuild process. We also use qualified GaSonics parts and services in our rebuilds.
Our high quality refurbished/remanufactured GaSonics ashing and etching systems include*:
- GaSonics Aura 1000 (A1000),
- GaSonics Aura 2000LL,
- GaSonics Aura 3010 (A3010),
- GaSonics AE 2000LL,
- GaSonics AE 2001,
- GaSonics L3510,
- GaSonics Plasma Etch 7100 Series.
| GaSonics Services |
| Audits |
| Installations & De-installations |
| Operator & Maintenance Training |
| Per Call Service |
| Full Time/Part Time On Site Service |
| Preventative Maintenance |
| Telephone Technical Support |
| Remanufacturing process as follows: (Note Spec Equipment follows all GaSonics rebuild procedures and uses qualified GaSonics vendors) |
| Chamber is stripped and re-anodized |
| Replace all Quartz |
| Replace chamber windows |
| Refurbish Cassette Elevators and Re-Anodize Plates( Complete wafer handling / mechanical motion: operate without error) |
| Refurbish Load Arm |
| Waveguide is rebuilt or replaced |
| MFC's and Baratron are cleaned and re-calibrated |
| Replace Lamps |
| MKS throttle valve & controller re-calibrated or replaced |
| All Electronics and wiring are thoroughly tested and repaired or replaced |
| All Consumable parts are replaced with new |
| Refurbish all switches or replace |
| 4 MFC's capability ( System includes 2 MFC's calibrated to customer gas specifications) |
| All outer covers are stripped and repainted with particle free paint |
| Options: |
| System upgraded with PC Based Controller and software upgrade: Process data acquisition, analysis, comprehensive calibration and diagnostic functions |
*We also provide parts, parts repair or exchange for Obsolete GaSonics and other ashing and etching systems:
- GaSonics Aura 1000,
- GaSonics Aura 2000LL,
- GaSonic Aura 3010
- GaSonics AE2000LL,
- GaSonics AE2001, and
- GaSonics L3510.
How may we help you? Contact us today to discuss your service needs or to request a price quote.
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See our inventory of GaSonics equipment available for purchase |
