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GaSonics is the industry leader in low-cost ashing
and etching systems. SPEC can support your reliable GaSonics equipment in the
field by providing upgrades, re-maufacturint or re-tooling.
We adhere to the highest equipment re-furbishment
standards. We follow all GaSonics documentation and procedures for the rebuild
process. And we use qualified GaSonics parts and services in our
rebuilds.
| GaSonics Services
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| Audits |
| Installations &
De-installations |
| Operator & Maintenance
Training |
| Per Call Service
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| Full Time/Part Time On
Site Service |
| Preventative Maintenance
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| Telephone Technical
Support |
| Remanufacturing process as follows:
(Note Spec Equipment follows all GaSonics rebuild procedures and uses qualified
GaSonics vendors) |
| Chamber is stripped and
re-anodized |
| Replace all Quartz |
| Replace chamber
windows |
| Refurbish Cassette Elevators and
Re-Anodize Plates( Complete wafer handling / mechanical motion: operate without
error) |
| Refurbish Load Arm |
| Waveguide is rebuilt or
replaced |
| MFC's and Baratron are cleaned and
re-calibrated |
| Replace Lamps |
| MKS throttle valve & controller
re-calibrated or replaced |
| All Electronics and wiring are
thoroughly tested and repaired or replaced |
| All Consumable parts are replaced
with new |
| Refurbish all switches or
replace |
| 4 MFC's capability ( System includes
2 MFC's calibrated to customer gas specifications) |
| All outer covers are stripped and
repainted with particle free paint |
| Options: |
| System upgraded with PC Based
Controller and software upgrade: Process data acquisition, analysis,
comprehensive calibration and diagnostic
functions |
We also provide parts,
parts repair or exchange for Obsolete GaSonics
and other ashing and etching systems..
How may we help you? Contact us today to
discuss your service needs or to request a price quote.
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See our inventory of GaSonics equipment available for
purchase |
