Austomatic Plasma Treatment and Cleaning

The 7100 Series is the most popular of the GaSonics International industrial batch treatment and cleaning systems. This full-featured system is based on proven reactor features and system drivers developed over the past twenty years.

The exclusive 7100 design is based on production experience and user feedback from thousands of systems in use worldwide.

Automatic batch low temperature plasma system for surface treatment and cleaning of organize metallic and composite substrates and assemblies.

• Lowest cost of ownership asher, > 95% uptime, 320 systems in production
• High throughput
• Very small footprint: 80cm (32”) Width x 80cm (32”) Length x 70cm (28”) Height
• Front and backside isotropic removal
• Downstream ashing for minimized device damage
• 75mm-1500mm wafer capability
• Pick and place wafer handling
• Precise endpoint detection
• Up to 4 MFC’s
• Pressure control, option
• SMIF compatible
• SECS II interface, multiple process step capability
• Variable lamp heating for temperature control
• Table top or floor/through the wall designs
  

Reactor Center

• 25”W x 44”H x 38” D (496 lbs./225 kg)
• Single 16” x 16” x 30” aluminum chamber with hinged access door
• Table top mountable
• All stainless steel plumbing
• Capacitance manometer pressure measurement (± 5 micron resolution)
• Pull-out chamber mount for easy service access
• Bulkhead mountable – stainless steel dress panels for room installation (optional)
• Manometer isolation valve
• Electrode configurations (user specified)
• 5 shelf (special order)
• 7 sheld (standard) 12.5” x 24.5”
• Box (cage) aa.5” x 11.5” x 25”
  

Control, Instrumentation and Programming

• Single board PC compatible CPU
• Board expandable
• Wide angle electroluminescent display with system status graphics
• Programming features
• Twenty recipe storage (limit)
• Twelve programmable steps for each recipe
• Recipe/alarms editor
• Menu driven programming
• Chamber purge
• Custom touch keypad
• Alpha characters through EL display
• Soft key features operator/user prompts
• Versatile I/O with ample spares, (analog and digital)
• RS 232 PORT
• Audible alarms
• Software loading and recipe storage in 3 ½” floppy disk drive
• Automatic pressure control (optional)
  
  

Gas Handling

• 2-Two fast response mass flow controlled gas lines (Model 7102)
• 4-Four fast response mass flow controlled gas lines (Model 7104)
• All stainless steel valves and gas lines
• Purge valving
• Capacitance manometer
• VCR fittings for process gases
  

System Power Control

• Operator station
  • ON/OFF (system)
  • Computer reset
  • Emergency off
• Rear panel operator station
  • ON/OFF (system)
  • ON/OFF (pump)
  • Emergency OFF
    
    

RF Power Generator

(OEM-6A – 16.63”w x 7”h x 15.5”w)
(76 lbs/35 kg)(7102/2, 7103/2)
(OEM 12A- 17”w x 8.75”h x 15.75” w)
(126 lbs/57kg.)(7104/1, 7104/1)

• 13.56 MHz
• 0-600 watts, continuously rated (OEM-6A); 0-1000 WATTS (OEM-12A)
• Solid state
• Water cooled
• Cooling water ON/OFF computer controlled
  

System Power Distribution

(21.5”w x 24”h x 8” d) NEMA 12 enclosure

• Single point power connection
• Main disconnect lockable in OFF position
• 24 VAC to complete system interlocks
  
• Master circuit breaker (GFCI breaker optional)
• System power distribution with individual circuit breaker overload protection

Safety and Security

• Electronic and software interlocks
  
• RF power
  
• Pressure
  
• Chamber door open/closed
  
• Emergency OFF front and rear of reactor center and on wall box
  
• Password security for manual and edit modes
  
• Audible alarms
  
• Software alarm limits on critical process parameters
  
• Over-temperature alarm sensor (generator)
  
• Hard-wired RF relay interlocked wit process chamber door
  
• External interlock connection to extend 24 VAC control loop.

Vacuum Pump (optional)

• Minimum 55 cfm (1560 LPM), PFPE lubrication required

Facility Requirements

• Compressed air: 80-100 psig (clean and dry)
  
• Electricals
  
• System power: 200 to 380 VAC or 480 VAC, 30A breaker 3°, 50/60 Hz
• Cooling water: OEM-12a 1.2 gpm (house water, filtered), 95° F/35° C maximum inlet temperature
• Cooling water: OEM-6A 0.8 gpm (house water, filtered), 95° F/35°C maximum inlet temperature
• Process gas fitting: 0.25” VCR stainless steel
  
• Purge Gas Fitting: 0.25” VCR stainless steel
  
• The reactor center includes the process chamber, operator interface controls, CPU, gas handling and automatch. A 24” to 28” table, minimum height is requires (not supplied with the system)
  
• The reactor center, RF generator and NEMA 12 enclosures are separate modules, Standard cable lengths of 8 feet are supplied to connect RF generator and reactor center.

System Configurations

• 7102/1 – Cage electrode, 2MFC’s
• 7102/2 – Cage electrode, 2MFC’s
  
• 7104/1 – Cage electrode, 4MFC’s
  
• 7104/2 – Cage electrode, 4MFC’s
  

How may we help you? Contact us today to discuss your service needs or to request a price quote.

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