Single Wafer
The GaSonics International Aura 3010 is the latest in a series of highly successful and proven downstream photoresist removal systems. This damage-free asher advances the Aura series by offering enhanced reliability. (>400 hours MTBF) and closed loop temperature control at the wafer, allowing for maximum process control and flexibility.
Features
- Fully automated downstream microwave asher
- High capital productivity – 400 hours. MTBF
- Closed loop temperature control at the wafer
- Small footprint
- No plasma damage
- High throughput
- SMIF compatible
- Lamp heating for slow or fast heat ramp
- Microwave, lamp, and endpoint detector monitors for guaranteed process performance
- Computer controlled, multiple-step capability
- 125mm-200mm capability
- SECS II interface, optional
Applications
- Bulk resist removal
- Implanted and damaged photoresist
- Non-oxidizing metal processing
- Descum
Product Specifications
125-200 Millimeter
| Process |
| Gas Flows |
O2=1000-10,000 sccm
N2=100-1000 sccm
N2/H2=100-2000 sccm |
| Pressure |
0.5->5.0 torr
|
| Microwave Power |
0-1400 watt at 2.45 GHz
|
| Wafer Temperature |
90-300 C°
|
| Throughput |
(1.2 µm. blanket softbaked resist ashed to end point, except for descum <300 Å.) |
| |
Bulk resist removal |
45-60 WPH |
| Implanted & damaged photoresist |
20-50 WPH |
| Non-oxidizing metal processing |
40-60 WPH |
| Descum |
45-60 WPH |
| Uniformity |
(i Sigma ashed to 50% of >1.2 µm resist) |
| |
Within a wafer |
2%-5% |
| |
Wafer to wafer (average) |
2%-4%(avg.) |
| Ash Rate |
<200 Å- >2.5 µm./min |
| System Matching |
2%-5% (I sigma) |
| Mobile Ion Concentration |
IEI0/cmP2-IEII/cm2 |
| CV Shift |
<0.1 volt |
| Particle |
<0.5/cm2, size of 0.2 µm. |
| Reliability |
| MTBF |
>400 hr. (6 mo. after sign-off) |
| MTBA |
> 100 hr. |
| MTTR |
< 3 hr. for 80% of all downs |
| MTTA |
<5 min. |
| UPTIME (SEMI E10-92 STD) |
90-90% (Equip. dependent uptime; must meet specific support requirements) |
| General Information |
| Substrate size |
5-8”/125mm-200mm |
| Footprint |
30”(75cm)W x 51.5”(128cm)D x5 8”(145cm)H |
| Electrical |
200-240 VAC, 3 Phase, 50/60 Hz. |
| |
WYI configuration, 40 Amp breaker |
| Typical Process Gases |
O2, N2,/H2,N2,--regulated 18-23 PSIG |
How may we help you? Contact us today to discuss your service needs or to request a price quote.
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