Single Wafer
The GaSonics IPC L3500 asher is a versatile system, designed for clean, damage-free removal of the most difficult resist structures. Using the production proven l3300 platform, the l3500 improves throughput and has a wide process window due to its patented large diameter microwave plasma source.
Features
- 3”-8” capabilities
- Platen and lamp heating capability
- Programmable process controls, including power
- Reliable endpoint detection
- OEM Grade microwave power generator
- Small footprint, low cost of ownership
- Graphics user interface
Product Specifications
| Process |
| Wafer Size |
150mm |
200mm |
| No lamp process: |
|
|
| Ash Rate (µ/min) |
2.5-3.0 |
1.5-1.8 |
| Ash Rate Uniformity (%) |
±10% |
±10% |
| Throughput (wph) |
52 |
45 |
| Damage Performance |
|
|
Delta Vfb |
<0.1 Volt greater than the control |
Mobile Ion Conc. |
<1-2E10/cm2 greater than control |
| Lamp Enhanced Ash Process |
| Ash Rate (µ/min) |
2.5-3.5 |
1.5-2.0 |
| Ash Rate Uniformity (%) |
±15% |
±15% |
| Throughput (wph) |
60 |
>50 |
| Particles Added |
>0.05 particles/cm2 of 0.3µ or larger |
| Standard Parameters |
| Flows |
2000 sccm O2 (gas1) |
| |
100 sccm N2O (gas2) |
| Pressure |
1.0-1.2 Torr Pressure |
| Excitation |
900 Watts µ-wave forward |
| Platen Temp |
250° C |
| Lamp Heating |
0 to 600 watts top side lamp heating |
| Process Applications |
| Excellent process results are achievable with minimum reflective power over a wide range of parameters when tuned to a fixed midrange point. |
| Turning Point: |
Pressure 3 Torr |
| |
Power 600 Watt |
| |
Flow (Gas1) 3000 sccm |
| |
Flow (Gas2) 50 sccm |
| |
900 Watts |
| Test Range: |
Pressure 500-5500 mTorr |
| |
Power 500-1000 Watt |
| |
Flow (Gas1) 500-5500 sccm |
| Reflected Power Measured |
Min. 2.3% of Setpoint |
| |
Max. 6% of Setpoint |
| L3500 Facility Requirements |
| Compressed Air |
80 to 100 PSIG |
| Electrical |
200 TO 240 VAC, 30A breaker, 1 phase, 50/60/Hz |
| Cooling Water |
1.2 GPM (house water, filtered) |
| Footprint |
29” W x 3 8” D x 56” H |
| Bulkhead dimensions |
10”D x 29” W (bulhead flange provided) |
| Process gas fittings |
¼” VCR stainless stel |
| Pneumatic gas fittings |
¼” compression, brass |
| Cooling water fittings |
3/8” stainless steel compression |
How may we help you? Contact us today to discuss your service needs or to request a price quote.
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