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Quality remanufacture and service of Karl Suss (Suss MicroTec) and other photolithography equipment.
SPEC Equipment specializes in Karl Suss (Suss MicroTec) photolithography systems as well as other lithography systems found in most semiconductor fabs.
SPEC can calibrate, repair, refurbish or even rebuild many Karl Suss models to meet OEM specifications. Our fully refurbished photolithography tools provide guaranteed performance at exceptional value.
SPEC is a leading mask aligner company in the United States with in-depth knowledge of the following Karl Suss tools:
MJB3, MA4, MA6, MA/BA6, MA6-NFH, MA8, MA8/BA6, MJB21, MA24, MA25, MJB55, MA56, MA56.5, MA150, MA200, SB6
In addition to high-quality pre-owned tools, SPEC also offers system software and hardware performance upgrades to extend the capabilities of existing equipment.
| Karl Suss Remanufacture Procedure |
| Clean/calibrate wafer alignment stage |
| Clean/calibrate wedge error compensation head |
| Clean/calibrate wafer transport assembly |
| Clean/calibrate pre-aligner assembly |
| Clean/calibrate microscope assembly |
| Clean/replace exposure optics |
| Calibrate all PCB?s |
| Calibrate UV lamp power supply |
| Replace UV lamp |
| Replace UV lamps anode/cathode wire |
| Replace pneumatic hoses |
| Replace relays |
| Adjust all pneumatic regulators/throttles |
| Refinish all machine covers |
| Verify all system functions |
| Refinish all machine covers |
We also provide parts, parts repair or exchange for Obsolete Karl Suss Lithography Equipment.
How may we help you? Contact us today to discuss your service needs or to request a price quote. |
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See our Karl Suss equipment available for purchase
See all of our photolithography equipment available for purchase
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