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SPEC specializes in Karl Suss photolithography equipment.
SPEC can
calibrate, repair, refurbish or even rebuild many Karl Suss models to meet OEM
specifications.
SPEC is the most experienced Mask Aligner Company in the United States with
in depth knowledge of the following Karl Suss tools:
MJB3, MA4, MA6,
MA/BA6, MA6-NFH, MA8, MA8/BA6, MJB21, MA24, MA25, MJB55, MA56, MA56.5, MA150,
MA200, SB6
Our fully refurbished photolithography tools provide guaranteed performance
at exceptional value.
In addition to high-quality pre-owned tools, SPEC also offers system software
and hardware performance upgrades to extend the capabilities of existing
equipment.
SPEC Services provides second source services, spares, and technical support
to the semiconductor fabrication market.
| Karl Suss Remanufacture Procedure |
| Clean/calibrate wafer alignment
stage |
| Clean/calibrate wedge error compensation
head |
| Clean/calibrate wafer transport assembly
|
| Clean/calibrate pre-aligner
assembly |
| Clean/calibrate microscope
assembly |
| Clean/replace exposure
optics |
| Calibrate all PCB?s |
| Calibrate UV lamp power
supply |
| Replace UV lamp |
| Replace UV lamps anode/cathode
wire |
| Replace pneumatic hoses |
| Replace relays |
| Adjust all pneumatic
regulators/throttles |
| Refinish all machine
covers |
| Verify all system
functions |
| Refinish all machine
covers |
Spec Equipment Corp. is an alternative source for Karl Suss and other
Lithography systems found on most Semiconductor fabs.
We provide high
quality remanufacture of the Suss MicroTec Product lines. Our fully refurbished
Karl Suss tested tools provide guaranteed performance at exceptional value.
Spec Equipment Corp. Services provides second source services, spares, and
technical support to the semiconductor fabrication marketplace.
We specialize in:
- field service
- support
- calibration and maintenance
We also provide parts, parts repair or exchange for Obsolete Karl Suss
Lithography Equipment.
How may we help you? Contact us today to
discuss your service needs or to request a price quote. |
