Surplus Process Equipment Corporation
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KLA Tencor SPEC Sheet 
High-quality remanufacture of the KLA-Tencor Metrology product lines.

SPEC Equipment is an alternative source for KLA-Tencor and other metrology systems found in most Semiconductor fabs.

We provide high quality remanufacture of the KLA-Tencor Product lines. Our fully refurbished and tested KLA-Tencor tools provide guaranteed performance at exceptional value.

In addition to high-quality pre-owned tools, SPEC also offers system software and hardware performance upgrades to extend the capabilities of existing equipment.

SPEC Services provides second source services, spares, and technical support to the semiconductor fabrication market.

KLA-Tencor Services Offered
Audits
Installations & De-installations
Operator & Maintenance Training
Per Call Service
Full Time/Part Time On Site Service
Preventative Maintenance
Telephone Technical Support
NIST Calibration Wafers (PSLs)
Remanufactured Lasers
Replacement Lamps
New Lasers From JDSU

We also provide parts, parts repair, or exchange for Obsolete Tencor and KLA Surfscan inspection equipment

 

Other KLA-Tencor Tools
We Service

Particle Measurement Systems -- Pattern & Non Pattern Units


Surfscan 4000-6000 & SP

Surfscan 7000 & AIT Series

Defect Inspection Systems
KLA 21XX Series
KLA UV Series

Surface Profilers
Tencor Alpha Step Series
Tencor P Series

Resistivity & Film Thickness Mapping
Prometrix RS Series
Prometrix SM Series

See our inventory KLA-Tencor equipment for purchase