| KLA-Tencor Services Offered |
| Audits |
| Installations & De-installations |
| Operator & Maintenance Training |
| Per Call Service |
| Full Time/Part Time On Site Service |
| Preventative Maintenance |
| Telephone Technical Support |
| NIST Calibration Wafers (PSLs) |
| Remanufactured Lasers |
| Replacement Lamps |
| New Lasers From JDSU |
For more information on SPEC Equipment's product services and refurbishing process for KLA-Tencor metrology systems, take a look at our detailed brochure here: KLA-Tencor Product Sales and Services.
Additionally, SPEC Equipment also provides parts, parts repair and exchanges for obsolete Tencor and KLA Surfscan inspection equipment.
Contact us today!
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See our inventory KLA-Tencor equipment for purchase |