SPEC Equipment Corporation provides second source services, spares, and technical support to the semiconductor fabrication marketplace. Among numerous other tools, we specialize in KLA-Tencor metrology systems. We provide high-quality refurbished and remanufactured KLA-Tencor product lines with gauranteed performance at exceptional values.

In addition, we offer system performance upgrades to extend and better the capabilities of existing KLA-Tencor equipment. Whether onsite or in-house, SPEC provides top-notch customer service.

Our field support and maintenance services are unmatched in the semiconductor marketplace. SPEC Equipment's professional service engineers have more than 25 years of combined experience, ensuring the best service available in the market for KLA-Tencor systems. 

For more information on SPEC Equipment's product services and refurbishing process for KLA-Tencor metrology systems, take a look at our detailed brochure here:
KLA-Tencor Product Sales and Services.

Additionally, SPEC Equipment also provides parts, parts repair and exchanges for obsolete Tencor and KLA Surfscan inspection equipment.

Contact us today!

See our inventory KLA-Tencor equipment for purchase